Application System
Laser Processing
Scan Optical System and Focusing Optical System

For the maskless processing, it can do direct drawing processing on the basis of the data like CAD.
It is usually classified as scan optical system and focusing optical system.
(There is also a hybrid scanning that combines both).

  Scan optical system Focusing optical system
Scanning method Galvano scan Stage scan
Scanning speed high low
Scanning area narrow wide
Focusing method fθLens Objective Lens
Focusing spot diameter few 10μ - few 100μ submicron - few 10μ
Death of focus deep shallow
Scan Type

Focusing System (with Observation System)



Laser Processing Systems
Shutter for High Power Laser

Safely interrupt the optical path by the highpower
laser mirror and beam.
Part Number SHPS-▢▢
S$ 5,250
Wavelengths [ nm ] 266、355、532、1064
Clear aperture [ mm ] Φ8
Corresponding Output about 20W
Laser Damage Threshold 5J/cm2 (@266nm) - 28J/cm2 (@1064nm)
On-Off Speed about 200ms
Variable Attenuator

Light quantity of the high-power laser can be
continuously variable by PBS and wavelength plate
Part Number SVAB-▢▢A-O8
S$ 4,525
Wavelengths [ nm ] 266、355、532、1064
Clear aperture [ mm ] Φ4
Corresponding Output 20W
Laser Damage Threshold 1.0J/cm2 (@266nm) - 5.1J/cm2(@1064nm)
Transmission Range 2 - 93% (@532nm)
Laser Beam Expander Unit

By lens configuration of the air gap, it is possible to correspond to
high-power laser and be strict collimation adjustment
in diopter correction mechanism.
Part Number BE/LBED series
S$ 525〜
Wavelengths [ nm ] 266、355、400〜700、1064
Laser Damage Threshold 1.4J/cm2 (@266nm) - 4J/cm2(@1064nm)
Magnification ×2 - ×21 (@400 - 700nm)
Incident Clear Aperture[ mm ] φ1.7
Auto Focus Unit

By built-in laser sensor, it enables high-speed
tracking even for transparent object such as
films or glasses.
Part Number TAF-SS-OBL-3
S$ Contact Us
Objective Lens 2× - 100×
Camera C-mount CCD camera
(element size 2/3″ or less)
Travel 3mm
Trace Range
(Track Range)
2×, 5×, 10× : ±1.5mm
20× : ±500μm
50× : ±250μm
100× : ±100μm
±6.0μm (5×), ±1.0μm (10×),
±0.5μm (20×, 50×, 100×)
Surface Accuracy Guarantee Mirror

Guaranteed surface accuracy in integrated holder,
ideal for built-in locking mechanism
fθ Lens

Lineup in each wavelength, scanning area and focal length
Objective Lens

For from DUV to the near-infrared and for various
processing laser
Barrel Unit + Laser Introduction Block

Observation barrel of optimal coaxial epi-illumination
for the positioning of the micro-machining
Motorized Stage

Plentiful lineup from high precision type to high
rigidity long stroke.

High rigidity base series to support the stable
Galvano Unit

Drawing high speed laser of high quality reducing the jitter and wobble

* it is available to assembly for each company’s galvanometer.
Please contact to our international sales division.