Vacuum Compatible Piezo Drive Motor / VPDM-13ACTR

A small, high-resolution actuator that can be operated remotely in the equipment of a high vacuum chamber .

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Part Number
VPDM-13ACTR
S$1,136.36
◦Two types of mounting shank diameters, a standard type of 9.5 mm diameter and a small type of 6 mm diameter, are available.
◦A flat actuator tip type (VPDM-**ACT) and a spherical actuator tip type (VPDM-**ACTR) are available.
More Information
Catalog Code W8023
RoHS Yes
CE Yes
Download Product's Datasheet
CAD data
Guide ▶The piezo drive controller (PDM-ID-02) is required to operate the motor.
▶There is a lead wire coming out of the actuator, which can be connected to the terminal of the chamber or the lead wire can be pulled out. The piezo drive actuator comes with a controller-specific connection cable (1m) to connect to this lead wire.
Attention ▶This product is driven by inertia using piezoelectric elements, so there is no precision in positioning, etc. In addition, the speed and minimum travel may vary depending on individual differences and the direction of the actuator's feed.
▶If you wish to combine with your own manual stage, please contact us for a separate consultation. .
▶If you purchase the stage and angled micrometer heads together, we assemble them and deliver to you. Please contact sales in advance. Depending on the specifications of the combination, additional work or modifications may be required. Please contact our sales.
Specifications
Tip ShapeR type
Travel>13mm (Max. 18mm)
Minimum travel<20nm
Thrust Force29.4N
Max Speed1.5mm/min
Weight0.05kg