Optical Defects Inspection System / Custom-made_OS-ODISYS

By automating visual inspections Reduction of inspector manpower and Uniformity of inspection quality can be achieved.
Because transparent glass and other optical components transmit light, visual identification of defects requires skilled experience.
This system uses a coaxial epi-illumination microscope capable of wide-field dark-field observation to visualize scattered light from minute surface defects.
The extracted defect images can be quantitatively inspected with the same accuracy as a skilled inspector using an AI model that utilizes deep learning.

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Part Number
Custom-made_OS-ODISYS
  • Vision Controller
    Detects arbitrarily set defect (Scratch & Dig) size from acquired images for pass/fail judgment. This versatile software has a learning (annotation) function that allows you to set different types of defects and calibrate their lengths. (Developed in partnership with Eureka Robotics)
More Information
Catalog Code W2094
RoHS No
CE No
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Specifications
Observation Range φ22mm
Field of View (35.7mm x 22.3mm
Working Distance 40mm
Resolution 38μm
Detection Performance/Width 1μm
Detection Performance/Depth >50 nm
Detection Performance/S-D 10-5 ~
Camera 1/1.2 inch (2.3 Mega-pixels), Cell size: 5.86x5.86μm, USB3.0 Super Speed
Observation Wavelength Visible(400 to 700nm)
Target Sample Glass, SiC, film etc.
Flat and Uneven surface (R20 to R1000)
Focus Unit Z:±30mm
Alignment Stage XY:±24mm, α:±20°, β:±15°
Sample Holder Size φ50mm, t=10mm