XY Axis Stainless Steel Extended Contact Translation Stages (TSDS)

Stainless Steel Linear Stages suitable for hard vacuum and clean room applications. Same design and performance as TSD stages.
Completely made of stainless steel for excellent corrosion resistance.
Both the stage and the stainless steel micrometer head are lubricated with a high grade vacuum grease (YVAC2).

The TSDS series stages are suitable for use in clean rooms or vacuum applications. Also ideal for use in airtight spaces that have to avoid outgassing.


 


TSDS-XY Axis Common Specifications

   
Products Type TSDS-252 TSDS-402 TSDS-602 TSDS-652
Stage Size 25×25mm 40×40mm 60×60mm 65×65mm
Travel ±3mm ±6.5mm ±6.5mm ±6.5mm
Load Capacity 49N(5.0kgf) 147N(15.0kgf) 343N(35.0kgf) 343N(35.0kgf)
Travel Accuracy / Straightness 0.5μm 0.5μm 0.5μm 0.5μm
Travel Accuracy / Pitch 30″ 30″ 25″ 25″
Travel Accuracy / Yaw 25″ 25″ 15″ 15″
Max. Moment Capacity / Pitch 3.0N・m 3.9N・m 6.4N・m 8.8N・m
Max. Moment Capacity / Roll 3.0N・m 3.9N・m 6.4N・m 8.8N・m
Max. Moment Capacity / Yaw 1.5N・m 2.5N・m 4.9N・m 4.9N・m
Moment Stiffness / Pitch 3.4″/N・cm 0.66″/N・cm 0.41″/N・cm 0.41″/N・cm
Moment Stiffness / Roll 4.0″/N・cm 0.66″/N・cm 0.41″/N・cm 0.41″/N・cm
Moment Stiffness / Yaw 4.0″/N・cm 0.8″/N・cm 0.41″/N・cm 0.41″/N・cm
Parallelism 50μm 30μm 30μm 50μm
Running Parallelism 20μm 20μm 20μm 20μm
Orthogonality 10μm 10μm 10μm 10μm
Guide Method Extended Contact Ball Bearing Guide
Primary material Stainless steel
Finish None

 

TSDS-XY Axis Series Specifications

Part Number Micrometer Position Type of Micrometer head Mounting Thread Travel Lead of Actuator/rotation Micrometer Readable Resolution Weight
TSDS-252C Center Micrometer Heads METRIC ±3mm 0.5mm 0.01mm 0.1kg
TSDS-252S Side Micrometer Heads METRIC ±3mm 0.5mm 0.01mm 0.1kg
TSDS-402C Center Micrometer Heads METRIC ±6.5mm 0.5mm 0.01mm 0.3kg
TSDS-402S Side Micrometer Heads METRIC ±6.5mm 0.5mm 0.01mm 0.3kg
TSDS-402CUU Center Micrometer Heads INCH ±6.5mm 0.5mm 0.01mm 0.3kg
TSDS-402SUU Side Micrometer Heads INCH ±6.5mm 0.5mm 0.01mm 0.3kg
TSDS-602C Center Micrometer Heads METRIC ±6.5mm 0.5mm 0.01mm 0.9kg
TSDS-602S Side Micrometer Heads METRIC ±6.5mm 0.5mm 0.01mm 0.9kg
TSDS-652C-M6 Center Micrometer Heads METRIC ±6.5mm 0.5mm 0.01mm 1.2kg
TSDS-652S-M6 Side Micrometer Heads METRIC ±6.5mm 0.5mm 0.01mm 1.2kg
TSDS-652CUU Center Micrometer Heads INCH ±6.5mm 0.5mm 0.01mm 1.2kg
TSDS-652SUU Side Micrometer Heads INCH ±6.5mm 0.5mm 0.01mm 1.2kg
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