XY Axis Stainless Steel Extended Contact Translation Stages (TSDS)
Stainless Steel Linear Stages suitable for hard vacuum and clean room applications. Same design and performance as TSD stages.
Completely made of stainless steel for excellent corrosion resistance.
Both the stage and the stainless steel micrometer head are lubricated with a high grade vacuum grease (YVAC2).
The TSDS series stages are suitable for use in clean rooms or vacuum applications. Also ideal for use in airtight spaces that have to avoid outgassing.
TSDS-XY Axis Common Specifications
Products Type | TSDS-252 | TSDS-402 | TSDS-602 | TSDS-652 |
---|---|---|---|---|
Stage Size | 25×25mm | 40×40mm | 60×60mm | 65×65mm |
Travel | ±3mm | ±6.5mm | ±6.5mm | ±6.5mm |
Load Capacity | 49N(5.0kgf) | 147N(15.0kgf) | 343N(35.0kgf) | 343N(35.0kgf) |
Travel Accuracy / Straightness | 0.5μm | 0.5μm | 0.5μm | 0.5μm |
Travel Accuracy / Pitch | 30″ | 30″ | 25″ | 25″ |
Travel Accuracy / Yaw | 25″ | 25″ | 15″ | 15″ |
Max. Moment Capacity / Pitch | 3.0N・m | 3.9N・m | 6.4N・m | 8.8N・m |
Max. Moment Capacity / Roll | 3.0N・m | 3.9N・m | 6.4N・m | 8.8N・m |
Max. Moment Capacity / Yaw | 1.5N・m | 2.5N・m | 4.9N・m | 4.9N・m |
Moment Stiffness / Pitch | 3.4″/N・cm | 0.66″/N・cm | 0.41″/N・cm | 0.41″/N・cm |
Moment Stiffness / Roll | 4.0″/N・cm | 0.66″/N・cm | 0.41″/N・cm | 0.41″/N・cm |
Moment Stiffness / Yaw | 4.0″/N・cm | 0.8″/N・cm | 0.41″/N・cm | 0.41″/N・cm |
Parallelism | 50μm | 30μm | 30μm | 50μm |
Running Parallelism | 20μm | 20μm | 20μm | 20μm |
Orthogonality | 10μm | 10μm | 10μm | 10μm |
Guide Method | Extended Contact Ball Bearing Guide | |||
Primary material | Stainless steel | |||
Finish | None |
TSDS-XY Axis Series Specifications
Part Number | Micrometer Position | Type of Micrometer head | Mounting Thread | Travel | Lead of Actuator/rotation | Micrometer Readable Resolution | Weight |
---|---|---|---|---|---|---|---|
TSDS-252C | Center | Micrometer Heads | METRIC | ±3mm | 0.5mm | 0.01mm | 0.1kg |
TSDS-252S | Side | Micrometer Heads | METRIC | ±3mm | 0.5mm | 0.01mm | 0.1kg |
TSDS-402C | Center | Micrometer Heads | METRIC | ±6.5mm | 0.5mm | 0.01mm | 0.3kg |
TSDS-402S | Side | Micrometer Heads | METRIC | ±6.5mm | 0.5mm | 0.01mm | 0.3kg |
TSDS-402CUU | Center | Micrometer Heads | INCH | ±6.5mm | 0.5mm | 0.01mm | 0.3kg |
TSDS-402SUU | Side | Micrometer Heads | INCH | ±6.5mm | 0.5mm | 0.01mm | 0.3kg |
TSDS-602C | Center | Micrometer Heads | METRIC | ±6.5mm | 0.5mm | 0.01mm | 0.9kg |
TSDS-602S | Side | Micrometer Heads | METRIC | ±6.5mm | 0.5mm | 0.01mm | 0.9kg |
TSDS-652C-M6 | Center | Micrometer Heads | METRIC | ±6.5mm | 0.5mm | 0.01mm | 1.2kg |
TSDS-652S-M6 | Side | Micrometer Heads | METRIC | ±6.5mm | 0.5mm | 0.01mm | 1.2kg |
TSDS-652CUU | Center | Micrometer Heads | INCH | ±6.5mm | 0.5mm | 0.01mm | 1.2kg |
TSDS-652SUU | Side | Micrometer Heads | INCH | ±6.5mm | 0.5mm | 0.01mm | 1.2kg |