FS-SPX Dedicated Controller for 5nm Feedback Stage / FC-611
Dedicated controller for 5nm feedback stage (FS-SPX series) to control with 5nm resolution.
Highly safe and easy to operate with various error detection functions, general-purpose I / O, and teaching functions.
Highly safe and easy to operate with various error detection functions, general-purpose I / O, and teaching functions.
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Part Number
FC-611
S$8,522.72
Catalog Code | W9304 |
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RoHS | Yes |
CE | No |
Download Product's Datasheet | |
In Position Range | +/- 5nm (+/- 15,+/- 35nm selectable) |
Minimum Command Unit | 5nm |
Max Travel Range Set Value | -671.088640~+671.088635mm |
Max Operating Speed Set Value | 30mm/sec |
Number of Control Axes | 2 axes |