5nm Feedback Stage / FS-1020SPX
FS-SPX is feedback stage with 5nm resolution positioning.
In-house optical linear encoder are built-in at the center of stage to detect position.
Positioning to target position, positioning repeatability and holding the position with high resolution is achieved by feedback control using position information of encoder.
There are two types of the stage which travel of 20mm and 50mm.
In-house optical linear encoder are built-in at the center of stage to detect position.
Positioning to target position, positioning repeatability and holding the position with high resolution is achieved by feedback control using position information of encoder.
There are two types of the stage which travel of 20mm and 50mm.
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Part Number
FS-1020SPX
S$5,113.63
| Catalog Code | W9303 |
|---|---|
| RoHS | No |
| CE | No |
| Download Product's Datasheet | |
| CAD data | |
| Stage Size | 60×60mm |
| Maximum Travel Speed | 10μm |
| Travel | 20mm |
| Positional Repeatability *1 | ±10nm |
| Minimum Resolution *1 | 5nm |
| Availability | 5mm/sec |
| Weight | 0.5㎏ |
| Feed Screw | Ball screw diameter φ4mm, 1mm lead |
| Load Capacity | 49N(5kgf) |
