10nm Feedback Stage / NFS180-200PX
High resolution feedback stage with 5-phase stepping motor, built-in glass scale, and CE/UKCA marking. The built-in optical glass scale provides high positional repeatability and high resolution.
The 10 nm Feedback Stage is available in 8 different table sizes.
The 10 nm Feedback Stage is available in 8 different table sizes.
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Part Number
NFS180-200PX
S$8,750.00
- Ball screw drive allows longer travel than piezo stages, and a wide variety of travel and table sizes can be selected.
- A plugin for the "Autoconfig" function is equipped for user convenience.
- Controllers compatible with the Feedback Stage (NFS series) are available.
| Catalog Code | W9316 | ||||||||||||||||||||||||||||||||||||||||||||||||||||||
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| RoHS | Yes | ||||||||||||||||||||||||||||||||||||||||||||||||||||||
| CE | Yes | ||||||||||||||||||||||||||||||||||||||||||||||||||||||
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| Guide |
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| Attention |
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| Specifications |
*1 Resolution is automatically set by “AutoConfig” when SHRC controller is connected. |
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