FS-X Dedicated Controller for Sub Micron Ｆeedback Stage / FC-414
Dedicated controller for sub micron feedback stage (FS-X series) to control with sub micron resolution.
Highly safe and easy to operate with various error detection functions, general-purpose I / O, and teaching functions.
Highly safe and easy to operate with various error detection functions, general-purpose I / O, and teaching functions.
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Part Number
FC-414
S$550,000.00
| Catalog Code | W9308 |
|---|---|
| RoHS | Yes |
| CE | No |
| Download Product's Datasheet | |
| In Position Range | +/- 50nm (+/- 150, +/- 350nm selectable) |
| Slow Down Sensor Input | Applicable |
| Minimum Command Unit | 50nm |
| Max Travel Range Set Value | -6710.88640 ～ +6710.88635mm |
| Max Operating Speed Set Value | 100mm/sec |
| Number of Control Axes | 2 axes |
