Sigma Fine (Piezo) Stages (high stiffness type) / SFS-H60XY(CL)
Nanometer resolution high stiffness flexure stages.
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Part Number
SFS-H60XY(CL)
◦These compact piezo stages offer high precision and high resolution positioning by utilizing full closed loop control with digital frequency based sensors.
◦Using piezo element actuators, open loop travel between 90μm − 100μm is available, with minimum incremental motion as small as 1nm. Compared to the open-loop control, the maximum travel of closed-loop control will be less about 20%.
◦Closed loop travel is 80% of the open loop maximum and closed loop resolution is 10nm.
◦Recommended controllers are the FINE series controllers. Both digital and analog inputs are available.
◦Using piezo element actuators, open loop travel between 90μm − 100μm is available, with minimum incremental motion as small as 1nm. Compared to the open-loop control, the maximum travel of closed-loop control will be less about 20%.
◦Closed loop travel is 80% of the open loop maximum and closed loop resolution is 10nm.
◦Recommended controllers are the FINE series controllers. Both digital and analog inputs are available.
| Catalog Code | W9054 |
|---|---|
| RoHS | No |
| CE | No |
| Download Product's Datasheet | |
| CAD data | |
| Attention | ▶The travel at closed loop control is reduced to around 20% less than at open loop control. |
| 3D_CAD | |
| Actuator | Piezo actuator |
| Axes of Travel | XY Axis |
| Stage Size | 60×60mm |
| Linearity | ＜0.3％ |
| Travel (at open-loop control) | 100μm±15％ |
| Positional Repeatability | ＜0.1μm |
| Weight | 0.43kg |
| Perpendicularity (Horizontal Direction) | 1μm |
| Compatible Cable | FINE-CA-3: For piezo DS1-CA-3: For digital sensor |
| Load Capacity | 14.7N（1.5kgf） |
| Micro-displacement Sensor | Digital Sensor |
| Resolution (closed-loop) | 10nm |
| Theoretical Resolution (open-loop | 1nm |
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