Precision Motorized Stages with Built-in Compact Scale / OSMS(CS)33-300(X)-INCH

Precision motorized stages with built-in compact optical scales make highly accurate and reliable full closed loop system using Sigma-Koki controllers (SHOT-302GS/304GS, HIT-M・HIT-S).

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Part Number
OSMS(CS)33-300(X)-INCH
S$4,522.72
◦U-shaped guide rail offers light weight, and minimized deflection to achieve high stiffness.
◦Includes a compact scale built in while keeping the installation space the same as that of the equivalent open loop OSMS series.
More Information
Catalog Code W9074
RoHS Yes
CE Yes
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CAD data
Guide ▶Contact our Sales Division for replacement of motors or for stabilizing (drop-preventing) mechanism. WEB Reference Catalog Code/W9500 (Motorized Stage System Question Sheet)
▶Grease change is optionally available.(WEB Reference Catalog Code/W9006)
▶Contact our Sales Division to use the stage as an XY axis or a Z axis stage.
3D_CAD



MAX Speed 100mm/sec
Scale head 0.5μm
Stage Material Aluminium
Sensor Part Number Micro photo sensor : GP1S092HCPIF(Sharp Corporation)
Stage Size 120×120mm
Backlash 3μm
Pitch 40″
Moment Stiffness / Pitch 0.12″/N・cm
Moment Stiffness / Yaw 0.08″/N・cm
Moment Stiffness / Roll 0.1″/N・cm
Yaw 25″
Limit Sensor Equipped (NORMAL CLOSE)
Lost Motion 5μm
Positioning Accuracy 25μm
Positioning Slide Outer rail structure
Travel 300mm
Proximity Origin Sensor Equipped (NORMAL OPEN)
Positional Repeatability 5μm
Origin Sensor Equipped (NORMAL CLOSE)
Weight 7.4kg
Running Parallelism 10μm
Feed Screw Ball screw diameter φ10mm, 10mm lead
Load Capacity 196N(20.0kgf)
Finish Black anodized
Resolution (Full) 20μm/pulse
Resolution (Half) 10μm/pulse
Parallelism 50μm
Scale Cable GSEF-CA-3
Sensor / Output Logic When shaded: Output transistor OFF (no conduction) : Limit Sensor
When shaded: Output transistor ON (conduction): Origin sensor, Proximity Origin Sensor
Sensor / Current Consumption 80mA or lower (20mA or lower per sensor)
Sensor / Control Output NPN open collector output 50mA
Sensor / Power Voltage DC5~24V±10%
Driver Cable D15D15A-CA
Motor / Motor Step Angle 0.72°
Motor / Motor Type 5-phase stepping motor 0.75A/phase (Tamagawa Seiki Co., Ltd.)
Motor / Motor Part Number TS3667N43E967(□42mm)
Compatible Controller SHOT-302GS、SHOT-304GS、HIT-M・HIT-S
Compatible Driver
Power Voltage / Current Consumption DC5V±5% / 100mA