50nm Feedback Stage / NFS-X
High resolution feedback stage with 5-phase stepping motor, built-in glass scale, and CE/UKCA marking. The built-in optical glass scale provides high positional repeatability and high resolution.
Ball screw drive allows longer travel than piezo stages, and a wide variety of travel and table sizes can be selected.A plugin for the "Autoconfig" function is equipped for user convenience.
Controllers compatible with the Feedback Stage (NFS series) are available.
The 1 nm Feedback Stage is available in 6 different table sizes.
Points for selecting the Travel
If you require a Travel other than those listed below, please contact our Sales.
Travel | Stage Size | Points |
---|---|---|
20mm | 75x60mm | Space-saving type, used when short travel is sufficient. |
40mm | 110x60mm | This is the most stable type and is recommended if there is enough space for installation. |
50mm | 100×100mm, 120×120mm | For high resolution positioning over long distances. |
100mm | 175×100mm, 175×120mm | For high resolution positioning over long distances. |
200mm | 230×180mm | For high resolution positioning over long distances.Lineup includes 10nm and 50nm resolution. |
300mm | 330×180mm | For high resolution positioning over long distances.Lineup includes 10nm and 50nm resolution. |
Feedback Stages (NFS Series) Resolution and Travel Lineups |
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(Resolution 50nm) NFS-X Sereis
Part Number | Stage Size | Travel | Positioning Accuracy* | Positional Repeatability * | Load Capacity | Weight |
---|---|---|---|---|---|---|
NFS60-20X | 75x60mm | 20mm | 1μm | 0.5μm | 49N(5.0kgf) | 0.5kg |
NFS60-40X | 110x60mm | 40mm | 1μm | 0.5μm | 49N(5.0kgf) | 1.0kg |
NFS100-50X | 100x100mm | 50mm | 1μm | 0.5μm | 98N(10.0kgf) | 2.7kg |
NFS100-100X | 175x100mm | 100mm | 2μm | 0.5μm | 98N(10.0kgf) | 3.7kg |
NFS120-50X | 120x120mm | 50mm | 1μm | 0.5μm | 98N(10.0kgf) | 3.0kg |
NFS120-100X | 175x120mm | 100mm | 2μm | 0.5μm | 98N(10.0kgf) | 4.0kg |
NFS180-200X | 230x180mm | 200mm | 2μm | 0.6μm | 196N(20.0kgf) | 13.2kg |
NFS180-300X | 330x180mm | 300mm | 2μm | 0.6μm | 196N(20.0kgf) | 17kg |
* Values when the multi-point error compensation function is enabled.
Cable for NFS Feedback Stage
Various cables for use with the NFS Feedback Stage are available.D15H12A-RC-3 is a Motor Cable to connect NFS series and 3 Axis Stage Controller (SHRC-203).
DM15HD14A-RC-3 is a Scale Cable to connect NFS series and 3 Axis Stage Controller (SHRC-203).