10nm Feedback Stage / NFS-PX

High resolution feedback stage with 5-phase stepping motor, built-in glass scale, and CE/UKCA marking. The built-in optical glass scale provides high positional repeatability and high resolution.

Ball screw drive allows longer travel than piezo stages, and a wide variety of travel and table sizes can be selected.
A plugin for the "Autoconfig" function is equipped for user convenience.
Controllers compatible with the Feedback Stage (NFS series) are available.
The 1 nm Feedback Stage is available in 6 different table sizes.

 

Points for selecting the Travel

If you require a Travel other than those listed below, please contact our Sales.

Travel	Stage Size	Points
20mm	75x60mm	Space-saving type, used when short travel is sufficient.
40mm	110x60mm	This is the most stable type and is recommended if there is enough space for installation.
50mm	100×100mm, 120×120mm	For high resolution positioning over long distances.
100mm	175×100mm, 175×120mm	For high resolution positioning over long distances.
200mm	230×180mm	For high resolution positioning over long distances.Lineup includes 10nm and 50nm resolution.
300mm	330×180mm	For high resolution positioning over long distances.Lineup includes 10nm and 50nm resolution.

 

Feedback Stages (NFS Series) Resolution and Travel Lineups

 

(Resolution 10nm) NFS-PX Series

Part Number	Stage Size	Travel	Positioning Accuracy*	Positional Repeatability *	Load Capacity	Weight
NFS60-20PX	75x60mm	20mm	1μm	0.5μm	49N(5.0kgf)	0.5kg
NFS60-40PX	110x60mm	40mm	1μm	0.5μm	49N(5.0kgf)	1.0kg
NFS100-50PX	100x100mm	50mm	1μm	0.5μm	98N(10.0kgf)	2.7kg
NFS100-100PX	175x100mm	100mm	2μm	0.5μm	98N(10.0kgf)	3.7kg
NFS120-50PX	120x120mm	50mm	1μm	0.5μm	98N(10.0kgf)	3.0kg
NFS120-100PX	175x120mm	100mm	2μm	0.5μm	98N(10.0kgf)	4.0kg
NFS180-200PX	230x180mm	200mm	2μm	0.6μm	196N(20.0kgf)	13.2kg
NFS180-300PX	330x180mm	300mm	2μm	0.6μm	196N(20.0kgf)	17kg

* Values when the multi-point error compensation function is enabled.

 

Cable for NFS Feedback Stage

Various cables for use with the NFS Feedback Stage are available.
D15H12A-RC-3 is a Motor Cable to connect NFS series and 3 Axis Stage Controller (SHRC-203).
DM15HD14A-RC-3 is a Scale Cable to connect NFS series and 3 Axis Stage Controller (SHRC-203).